Details
The S neox Five Axis 3D Optical profiler combines a high-accuracy rotational module with the advanced inspection and analysis capabilities of the S neox 3D optical profiler. This enables automatic 3D surface measurements at defined positions which can be combined to create a complete 3D volumetric measurement.
MEASURING TECHNOLOGIES
Cover a wide range of scales
S neox 3D measurement technologies cover a wide range of scales, including form (Ai Focus Variation), sub nanometric roughness (Interferometry) or critical dimensions that require high lateral resolution as well as vertical resolution (Confocal).
MEASURING TECHNOLOGIES
Maximum versatility
The Five Axis system makes it possible to take automatic 3D surface measurements at defined positions, and combine them to create a complete 3D volumetric measurement or to inspect the surface finish at specific positions around the sample.
MEASURING TECHNOLOGIES
A complete 3D measurement
S neox Five Axis can measure the sample at different positions of rotation and elevation (perspectives), generating a group of individual measurements. The SensoFIVE software merges all of the surfaces providing a sample surface with high accuracy by using the stacked image information of each single surface measurement. The system can provide shape and form information on sharp edges and/or critical surfaces by merging different elevations.
CONNECTING ADJOINING SURFACES
Measure angles greater than 90º
Measuring complex surfaces which contain steep angles is very difficult due to shadowing effects that prevent you from obtaining a complete measurement within a single acquisition. It is necessary to tilt the sample to measure it from two different positions and combine the two topography results to obtain the complete measurement. Five Axis rotational stage allows the sample to be positioned in opposite directions to make the entire surface visible. The 3D optical profiler will acquire the individual measurements, and then it will merge them automatically to get the complete 3D volumetric measurement.
MULTIPLE AXIS POSITIONS
Measurements without limitation
Measuring different parts of the sample with one click is possible thanks to automation routines. A user-friendly interface allows you to find the measurement position without any constraints. Then focus on the critical parts of your sample and add them to the automation routine. Finally click Acquire to obtain all parts measured with one single click. This is an incredibly fast and easy way to automate the measurement routines.
SURFACE FINISH MEASUREMENTS
Accurate and reliable
Our Confocal and Interferometry technologies allow you to measure surfaces with any kind of roughness from extremely rough (typical of additive manufacturing applications) to highly reflective surfaces of the order of 1 A as a diamond mirror-like surface. Converting our 3D optical profiler into repetitive and traceable, according to NPL, NIST and PTB roughness standards. Ai Focus Variation technology provides an easy and quick response for measuring outstanding slopes independently of the objective lenses.
360º of endless rotation
The Five Axis rotational stage consists of a high-precision motorized rotating A axis with 360º of endless rotation, 10 arc sec positioning repeatability, a motorized B axis, -30º to 110º, 0.5 arc sec resolution, with limit switch. It is equipped with a System3R clamping system.
Assorted holders & collets
Different types of holders are available depending on the sample. For rotational samples, a collet holder (multiple options are available on request) with fifteen collets, and for the others, a flat holder. S neox Five Axis also includes a calibration pack composed of a flat mirror and a calibration specimen.
Ring light
The Ring light is based on an LED ring for illuminating samples in a uniform and efficient way. It is mounted above and around the objective. The ring light provides increased signal for both Confocal and Ai Focus Variation techniques. This ensures proper illumination at the focal plane.
Insert holder
The insert holder is an optional accessory for the S neox Five Axis, designed to position cutting tools in the precise location needed for measurement. It is compatible with all insert models currently on the market.
Discover any geometric deviation ortolerance limit of your measured part.
Automatic Measurement Recipes
Five Axis measurement recipes allow you, the user, to capture the entire surface area in order to measure critical dimensions (angles, radius, contour), along with surface finish acording to ISO 25178 (form and roughness) and volume. Automated measurement routines can be executed for batch processing of parts for QA/QC applications with SensoFIVE.
Areal surface texture parameters
SensoFIVE is compliant with several ISOs. A complete selection of ISO 3D areal surface texture parameters is available: height, spatial, hybrid, functional and volumetric parameters.
Geomagic Control X is a comprehensive metrology software platform that delivers the industry’s most powerful tools within straightforward workflows. With Geomagic Control X, quality managers are enabled with revolutionary ease-of-use, intuitive, comprehensive controls and traceable, repeatable workflows for the quality measurement process. Its fast, precise, information-rich reporting and analysis enable significant productivity and quality gains in any manufacturing workflow.
Powerful Analysis Software
SensoVIEW is an ideal software for a broad range of analysis tasks. It includes a comprehensive suite of tools for preliminary examination and analysis of 3D or 2D measurements, allowing roughness or volume calculations and measuring critical dimensions (angles, distances, diameters) with a set of analysis tools.
Rapid Quality Control
It has never been so easy to perform rapid quality control in a production line. Thanks to SensoPRO, a production line operator only needs to load the sample and follow guided instructions to get a pass/fail report. Plug-in-based data analysis algorithms provide a high degree of flexibility. New modules can be easily customized to other industry needs.
Advanced Analysis Software
SensoMAP, based on Mountains technology from Digital Surf, is an extremely powerful tool for analysis and reporting. SensoMAP software is completely modularly adaptable to customer requirements. Two levels (standard and premium) and several modules are available.
Technologies
Light sources
630nm 530nm 460nm 575nm
Dimensions
Base & Column Controller
Objective lenses performance
- Brightfield
| MAG | 5X | 10X | 20X | 50X | 100X | 150X |
| NA | 0.15 | 0.30 | 0.45 | 0.80 | 0.90 | 0.90 |
| WD (mm) | 23.5 | 17.5 | 4.5 | 1.0 | 1.0 | 1.5 |
| FOV1 (µm) | 3378 x 2826 | 1689 x 1413 | 845 x 707 | 338 x 283 | 169 x 141 | 113 x 94 |
| Spatial sampling2 (µm) | 1.38 | 0.69 | 0.34 | 0.13 | 0.07 | 0.05 |
| Optical resolution3 (µm) | 0.94 | 0.47 | 0.31 | 0.18 | 0.16 | 0.16 |
- Interferometry
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| NA | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 6756 x 5652 | 3378 x 2826 | 1689 x 1413 | 845 x 707 | 338 x 283 | 169 x 141 |
| Spatial sampling2 (µm) | 2.76 | 1.38 | 0.69 | 0.34 | 0.13 | 0.07 |
| Optical resolution3 (µm) | 1.87 | 1.08 | 0.47 | 0.35 | 0.26 | 0.20 |
PSI / ePSI / CSI
| System noise4 (nm) | PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm | |||||
| Maximum slope5 (º) | 4 | 7 | 17 | 24 | 33 | 44 |
Other objectives available: Variable reflectance | Michelson | Mirau | Linnik
1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD.
5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.
Accuracy and repeatability
| Standard | Value | U, σ | Technique |
| Step height | 48600 nm | U=300 nm, σ= 10 nm | Confocal & CSI |
| 7616 nm | U=79 nm, σ= 5 nm | Confocal & CSI | |
| 941.6 nm | U=7 nm, σ= 1 nm | Confocal & CSI | |
| 186 nm | U=4 nm, σ= 0.4 nm | Confocal & CSI | |
| 44.3 nm | U=0.5 nm, σ= 0.1 nm | PSI | |
| 10.8 nm | U=0.5 nm, σ= 0.05 nm | PSI | |
| Areal roughness (Sa)7 | 0.79 µm | U=0.04 µm, σ=0.0005 µm | Confocal, AiFV & CSI |
| Profile roughness (Ra)8 | 2.40 µm | U=0.03 µm, σ= 0.002 µm | Confocal, AiFV & CSI |
| 0.88 µm | U=0.015 µm, σ= 0.0005 µm | Confocal, AiFV & CSI | |
| 0.23 µm | U=0.005 µm, σ= 0.0002 µm | Confocal, AiFV & CSI |
Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%).
σ according to 25 measures.
7 Area of 1x1mm. 8 Profile of 4mm length.
Rotational stage
| Max. measurable diameter | 200 mm |
| Max. clamping diameter10 | 20 mm |
| Max. workpiece weight | 3 Kg |
| Accuracy (A) | 5 Arc sec/º |
| Bidirectional repeatability (A) | 10 Arc sec |
| Resolution (B) | 0.5 Arc sec |
| Straightness error11 | 3.6 µm / 40 mm |
| Parallelism error11 | 53.9 µm / 40 mm |
| Flatness error12 | 20 µm |
All values according to ISO1101 at 20ºC +/- 1º in an anti-vibration environment.
10 ER32 collet holder. 11 St Flatness deviation according to ISO25178-2 taken on a SiC reference flat mirror and 20X objective in Confocal acquisition mode. 12 All values are taken with a 20X objective in Confocal acquisition mode and 40 mm evaluation length.
- XY
| XY | Motorized |
| M | |
| Travel range (mm) | 154 x 154 |
- Z
| Z | COARSE (Linear stage) | FINE (Piezoelectric scanner with capacitive sensor) |
| Vertical range | 40 mm | 200 µm |
| Resolution | 5 nm | 1.25 nm |
Computer & Operating system
| Computer | 8th generation Intel® Core™ i7 Processor Display 3840×2160 pixels resolution (4K)(27″) |
| Operating System | Microsoft Windows 10, 64-bits |
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