Details

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The S lynx 2 is equipped with three very powerful measuring techniques: Interferometry, Confocal, and Ai Focus Variation – each faster than the last.

This dynamic trio allows for data collection across a wide range of materials using the optimal technology for every surface, guaranteeing unparalleled measurement accuracy.

Plus, the acquisition calculations are executed within the sensor head, allowing the PC’s full power to be utilized for the data analysis.
 

The advanced stitching capabilities allow you to capture high-resolution data over larger areas. Our innovative algorithms cover the entire motorized stage range, spanning an impressive 125 x 75 mm for the system’s compact size.

The small size and compact design of the system allow it to fit into the tightest spaces of your lab or production floor.
 

Owning a Sensofar system is not just having a high-end optical profilometer; it is your ticket to unlocking a world of tools and content, empowering you to fully engage with the process of surface characterization.

 

This bench-top system combines manual and motorized components, making recurring tasks like finding the focus, leveling, and navigating your sample easier than ever.



 

It easily fits and focuses on samples with an adjustable column accommodating up to 100 mm movement. The motorized Z stage’s 20 mm travel range achieves precision and fine-tuned focus for even the smallest samples.


 

Effortlessly place and navigate your samples with the motorized XY stage, with a travel range of 125 x 75 mm, and easily level them using a tip-tilt stage perfectly aligned to the optical axis.


 

Experience what is possible by switching between objective lenses at any time during operation using a 6-position motorized nosepiece. Select from a wide range of compatible lenses, including specific options with super-long working distances and water immersion capabilities.


 

Operate the S lynx 2 seamlessly with the computer system of your choice. Whether you opt for our recommended PC configuration or leverage your own, you have the flexibility to tailor the setup to precisely match your requirements.


 

SensoSCAN ML, the software running the S lynx 2, gives the possibility to customize the acquisition interface. Simplify the interface and display the critical settings for your samples.
 

Discover the versatility of SensoSCAN ML with three distinct operator levels. Unlock advanced capabilities such as calibration and recipe modification at the highest level while restricting lower levels to predefined recipes and acquisitions.
 

Powerful Analysis Software

SensoVIEW is the ideal analysis software for a wide range of tasks. It features a complete toolkit for preparing and extracting data from both 2D and 3D datasets.


 

SensoVIEW provides dedicated operators with a user-friendly, step-by-step interface for extracting flatness and surface texture parameters, following the corresponding ISO standards, volume calculations, and more.

 

A variety of tools for critical dimensions are available for contour and profile views. Each one is equipped with an auto-adjustment feature and the capability to incorporate tolerances, ensuring a thorough dimensional analysis.

 

Rapid Quality Control

SensoPRO has an extensive suite of plugins, addressing common automation analysis needs and custom applications.


 

CSI

                               
Confocal                    Interferometry         Ai Focus Variation
 

Light sources

         
460nm            580nm

 

Profiler dimensions

 

Objective lenses

• Brightfield

MAG	5X	10X	20X	50X	100X
NA	0.15	0.30	0.45	0.80	0.90
WD (mm)	20	15.8	3.0	1.0	2.0
FOV1 (µm)	2820 x 2820	1410 x 1410	700 x 700	280 x 280	141 x 141
Spatial sampling2 (µm)	2.76	1.38	0.69	0.27	0.13
Optical resolution3 (µm)	1.11	0.55	0.37	0.21	0.15

 

• Interferometry

MAG	2.5X	5X	10X	20X	50X	100X
NA	0.075	0.13	0.30	0.40	0.55	0.70
WD (mm)	10.3	9.3	7.4	4.7	3.4	2.0
FOV1 (µm)	5650 x 5650	2820 x 2820	1410 x 1410	700 x 700	280 x 280	140 x 140
Spatial sampling2 (µm)	5.52	2.76	1.38	0.69	0.27	0.07
Optical resolution3 (µm)	2.32	1.34	0.58	0.44	0.32	0.25

 

CSI

Measurement noise4 (nm)	<5 nm
Maximum slope5 (º)	4	7	17	24	33	44

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 Measurement noise is measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.   5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

 

XYZ performance

• XY

XY	Motorized
Travel range (mm)	125 x 75

 

• Z

Z	Linear stage
Vertical range	20 mm
Resolution	5 nm

 

Accuracy and repeatability
 

Standard	Value	Uncertainty (U)	Repeatability (σ)	Technique
Step height (H)	<10 µm	U= (0.005 + H/50) μm	<10 nm	Confocal, AiFV & CSI
	>10 µm	U = (0.120 + H/120) μm	>10 nm	Confocal, AiFV & CSI
Areal roughness (Sa)	0.79 µm	40 nm	6 nm	Confocal, AiFV & CSI

Values obtained in a VC-E vibration environment. Objective used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1024×1024 pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures.

 

Computer & Operating system

Computer requirements	Intel® Core™ i5/i7 Processor Ethernet connectivity, minimum 1920 x 1080 display resolution
Operating System	Microsoft Windows 10 or higher